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Characterization of overlay mark fidelity

Author(s):
Adel, M. ( KLA-Tencor Corp. (Israel) )
Ghinovker, M.E. ( KLA-Tencor Corp. (Israel) )
Poplawski, J.M. ( KLA-Tencor Corp. (Israel) )
Kassel, E. ( KLA-Tencor Corp. (Israel) )
Izikson, P. ( KLA-Tencor Corp. (Israel) )
Pollentier, I.K. ( IMEC (Belgium) )
Leray, P. ( IMEC (Belgium) )
Laidler, D.W. ( IMEC (Belgium) )
3 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5038
Pub. Year:
2003
Vol.:
1
Page(from):
437
Page(to):
444
Pages:
8
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
Language:
English
Call no.:
P63600/5038
Type:
Conference Proceedings

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