New method to enhance overlay tool performance

Author(s):

Attota, R. ( National Institute of Standards and Technology (USA) )

Silver, R.M. ( National Institute of Standards and Technology (USA) )

Stocker, M.T. ( National Institute of Standards and Technology (USA) )

Marx, E. ( National Institute of Standards and Technology (USA) )

Jun, J.-S.J. ( National Institute of Standards and Technology (USA) )

Davidson, M.P. ( Spectel Research Corp. (USA) )

Larrabee, R.D. ( National Institute of Standards and Technology (USA) )

2 more

Publication title:

Metrology, Inspection, and Process Control for Microlithography XVII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5038

Pub. Year:

2003

Vol.:

1

Page(from):

428

Page(to):

436

Pages:

9

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448439 [0819448435]

Language:

English

Call no.:

P63600/5038

Type:

Conference Proceedings