Enhancing yield and productivity with process control applications for contact and via module

Enhancing yield and productivity with process control applications for contact and via module

Author(s):

Majoni, S. ( Philips GmbH (Germany) )
Englard, I. ( Applied Materials (Netherlands) )

Publication title:

Metrology, Inspection, and Process Control for Microlithography XVII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5038

Pub. Year:

2003

Vol.:

1

Page(from):

255

Page(to):

263

Pages:

9

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448439 [0819448435]

Language:

English

Call no.:

P63600/5038

Type:

Conference Proceedings

Details

TDL ID:	ZA00013025
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2003 : 17th
Conf. info. (Venue):	Santa Clara, California, USA
Conf. info. (Date):	2003.02.24-2003.02.27
Note for article:	Process Control and Characterization I ; 5038-26

Similar Items:

1 Conference Proceedings Novel approach for immersion lithography defectivity control to ,INCrease productivity I. Englard, R. Stegen, P. Vanoppen, I. Minnaert-Janssen, T. der Kinderen Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings YIELD ENHANCEMENT BY CRYOKINETIC CLEANING Butterbaugh, J.W., Loper, S., Thomes, G. Electrochemical Society
2 Conference Proceedings Yield enhancement in micromechanical sensor fabrication using statistical process control Borenstein,J.T., Preble,D.M. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Productivity Enhancement for Process Engineering: PC/Mainframe Interactions Forster, Allen. V. American Institute of Chemical Engineers
3 Conference Proceedings Process window OPC for reduced process variability and enhanced yield [6154-139] Krasnoperova, A., Culp, J. A., Graur, I., Mansfield, S., Al-Imam, M., Maaty, H. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Development of consolidated in-situ metallization processes for enhanced productivity Axan,B., Edmonds,D. SPIE-The International Society for Optical Engineering
4 Conference Proceedings A 90-nm design-rule patterning application using alt-PSM with KrF lithography for volume manufacturing at k1=0.27 Majoni, S., Driessen, F.A., Kasprowicz, B.S., Harris, P.D. SPIE - The International Society of Optical Engineering	10 Conference Proceedings (82e) Enhanced Learning Via Open-Form Laboratory Projects for Process Control Tomas Co American Institute of Chemical Engineers
5 Conference Proceedings Improving scanner productivity and control through innovative connectivity application [6152-168] Ishill, Y., Wakamoto, S., Kato, A., Eichelberger, B. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Enhancing productivity and sensitivity in mask production via a fast integrated T+R pattern inspection and STARlight-2 contamination inspection on critical … J. -P. Sier, E. H. Lu, K. Bhattacharyya, S. Chakravarty, M. Lang, H. Schmalfuss, J. Heumann, T. Schulmeyer SPIE - The International Society of Optical Engineering
6 Conference Proceedings Wire length and via reduction for yield enhancement Chiluvuri,V.K.R., Koren,I. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Improving contact and via process latitude through selective upsizing C. Yuan, G. Abeln, B. Anthony, G. Chen, S. Robertson Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12