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Defect printability of hole pattern on electron projection lithography

Author(s):
  • Yamamoto, J. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
  • Tomo, Y. ( Sony Corp. (Japan) )
  • Shimizu, S. ( Nikon Corp. (Japan) )
  • Iwasaki, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
  • Yamabe, M. ( Semiconductor Leading Edge Technologies, Inc. (Japan) )
Publication title:
Emerging Lithographic Technologies VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5037
Pub. Year:
2003
Vol.:
2
Pt.:
Poster Session
Page(from):
972
Page(to):
982
Pages:
11
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448422 [0819448427]
Language:
English
Call no.:
P63600/5037
Type:
Conference Proceedings

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