22-nm lithography using near-field x rays

22-nm lithography using near-field x rays

Author(s):

Bourdillon, A.J. ( UhrlMasc Inc. (USA) )
Williams, G.P. ( Thomas Jefferson National Accelerator Facility (USA) )
Vladimirsky, Y. ( UhrlMasc Inc. (USA) )
Boothroyd, C.B. ( Institute of Materials Research Engineering (Singapore) )

Publication title:

Emerging Lithographic Technologies VII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5037

Pub. Year:

2003

Vol.:

2

Pt.:

Session 16

Page(from):

622

Page(to):

633

Pages:

12

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448422 [0819448427]

Language:

English

Call no.:

P63600/5037

Type:

Conference Proceedings

Details

TDL ID:	ZA00013023
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging Lithographic Technologies
Conf. info. (Number):	2003 : 7th
Conf. info. (Venue):	Santa Clara, California, USA
Conf. info. (Date):	2003.02.25-2003.02.27
Note for article:	Session 16. Future Lithography Systems ; 5037-79

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