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Multi component EUV multilayer mirrors

Author(s):
  • Braun, S. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Foltyn, T. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Loyen, L. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Moss, M. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Leson, A. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
Publication title:
Emerging Lithographic Technologies VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5037
Pub. Year:
2003
Vol.:
1
Pt.:
Session 8
Page(from):
274
Page(to):
285
Pages:
12
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448422 [0819448427]
Language:
English
Call no.:
P63600/5037
Type:
Conference Proceedings

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