Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes
- Author(s):
Murakami, K. ( Association of Super-Advanced Electronics Technologies (Japan) ) Saito, J. ( Association of Super-Advanced Electronics Technologies (Japan) ) Ota, K. ( Association of Super-Advanced Electronics Technologies (Japan) ) Kondo, H. ( Association of Super-Advanced Electronics Technologies (Japan) ) Ishii, M. ( Association of Super-Advanced Electronics Technologies (Japan) ) Kawakami, J. ( Association of Super-Advanced Electronics Technologies (Japan) ) Oshino, T. ( Association of Super-Advanced Electronics Technologies (Japan) ) Sugisaki, K. ( Association of Super-Advanced Electronics Technologies (Japan) ) Zhu, Y. ( Association of Super-Advanced Electronics Technologies (Japan) ) Hasegawa, M. ( Association of Super-Advanced Electronics Technologies (Japan) ) Sekine, Y. ( Association of Super-Advanced Electronics Technologies (Japan) ) Takeuchi, S. ( Association of Super-Advanced Electronics Technologies (Japan) ) Ouchi, C. ( Association of Super-Advanced Electronics Technologies (Japan) ) Kakuchi, O. ( Association of Super-Advanced Electronics Technologies (Japan) ) Watanabe, Y. ( Association of Super-Advanced Electronics Technologies (Japan) ) Hasegawa, T. ( Association of Super-Advanced Electronics Technologies (Japan) ) Hara, S. ( Association of Super-Advanced Electronics Technologies (Japan) ) Suzuki, A. ( Association of Super-Advanced Electronics Technologies (Japan) ) - Publication title:
- Emerging Lithographic Technologies VII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5037
- Pub. Year:
- 2003
- Vol.:
- 1
- Pt.:
- Session 8
- Page(from):
- 257
- Page(to):
- 264
- Pages:
- 8
- Pub. info.:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448422 [0819448427]
- Language:
- English
- Call no.:
- P63600/5037
- Type:
- Conference Proceedings
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