Device for controlling a charged particle beam structure

Device for controlling a charged particle beam structure

Author(s):

Kozlov, A.N. ( Research Institute for Electron and Ion Optics (Russia) )
Smolyaninov, V.D. ( Research Institute for Electron and Ion Optics (Russia) )
Eremin, A.P. ( Research Institute for Electron and Ion Optics (Russia) )
Filachev, A.M. ( ORION State Scientific Ctr. (Russia) )

Publication title:

Fifth Seminar on Problems of Theoretical and Applied Electron and Ion Optics : 14-15 November 2001, Moscow, Russia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5025

Pub. Year:

2003

Page(from):

75

Page(to):

78

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819448262 [0819448265]

Language:

English

Call no.:

P63600/5025

Type:

Conference Proceedings

Details

TDL ID:	ZA00013009
Series ID:	PA00000029
Conf. info. (Name):	Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Conf. info. (Number):	2001 : 5th
Conf. info. (Venue):	Moscow, Russia
Conf. info. (Date):	2001.11.14-2001.11.15

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