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Production scale MOVPE reactors for electronic and optoelectronic applications

Author(s):
Protzmann, H. ( AIXTRON AG (Germany) )
Gerstenbrandt, G. ( AIXTRON AG (Germany) )
Alam, A. ( AIXTRON AG (Germany) )
Schoen, O. ( AIXTRON AG (Germany) )
Luenenbuerger, M. ( AIXTRON AG (Germany) )
Dikme, Y. ( RWTH-Aachen (Germany) )
Kalisch, H. ( RWTH-Aachen (Germany) )
Jansen, R.H. ( RWTH-Aachen (Germany) )
Heuken, M. ( AIXTRON AG (Germany) )
4 more
Publication title:
10th International Symposium on Nanostructures: Physics and Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5023
Pub. Year:
2003
Page(from):
72
Page(to):
74
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448248 [0819448249]
Language:
English
Call no.:
P63600/5023
Type:
Conference Proceedings

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