Estimating cross-section semiconductor structure by comparing top-down SEM images
- Author(s):
- Price, J.R. ( Oak Ridge National Lab. (USA) )
- Bingham, P.R. ( Oak Ridge National Lab. (USA) )
- Tobin, K.W. Jr., ( Oak Ridge National Lab. (USA) )
- Karnowski, T.P. ( Oak Ridge National Lab. (USA) )
- Publication title:
- Machine vision applications in industrial inspection XI :proceedings of electronic imaging science and technology 2003 : 22-24 January 2003, Santa Clara, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5011
- Pub. Year:
- 2003
- Page(from):
- 161
- Page(to):
- 170
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448118 [0819448117]
- Language:
- English
- Call no.:
- P63600/5011
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Integrated applications of inspection data in the semiconductor manufacturing environment
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Detection of semiconductor defects using a novel fractal encoding algorithm
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Field-test results of an image retrieval system for semiconductor yield learning
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Spatial heterodyne interferometry techniques and applications in semiconductor water manufacturing
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |