Blank Cover Image

Tunnel profile measurement by vision metrology toward application to NATM

Author(s):
Publication title:
Machine vision applications in industrial inspection XI :proceedings of electronic imaging science and technology 2003 : 22-24 January 2003, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5011
Pub. Year:
2003
Page(from):
50
Page(to):
58
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448118 [0819448117]
Language:
English
Call no.:
P63600/5011
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Application of scatterometry for CD and profile metrology in 193-nm lithography process development

Chen, L.-J., Ke, C.-M., Yu, S.S., Gau, T.-S., Chen, P., Ku, Y.-C., Lin, B.J., Engelhard, D., Hetzer, D., Yang, J.Y., …

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Three-dimensional metrology in MEMS applications

Friz, A., Best, K.F., Pannu, S., Nee, J.T.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Measurement of skin colors of world population and its application for preparing make-up products

Takata, S., Akimoto, M., Kawada, K., Takahashi, M., Kumagai, S.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Simulation of critical dimension and profile metrology based on scatterometry method [6349-57]

Chalykh, R., Pundaleva, I., Kim, S., Cho, H.-K., Moon, J.-T.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Microelectromechanical systems (MEMS) and their photonic application (Invited Paper)

Uenishi,Y., Akimoto,K., Nagaoka,S.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Using machine vision for aspheric optical profiling measurements

Chan,S.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Influence of Grain Boundaries on Plastic Deformation in Pure Mg and AZ31 Mg Alloy Polycrystals

Ono, N., Nakamura, K., Miura, S.

Trans Tech Publications
10 Conference Proceedings Nitrogen Profile Engineering for Tunnel Oxynitrides

Sugizaki, T., Tada, Y., Hikazutani, K-I., Nakanishi, T., Takasaki, K.

MRS - Materials Research Society
5 Conference Proceedings * TOWARD 20% EFFICIENCY WITH a-Si // POLY-Si TANDEM SOLAR CELL

Yoshimi, M., Ma, W., Horiuchi, T., Lim, C.C., De, S.C., Hattori, K., Okamoto, H., Hamakawa, Y.

Materials Research Society
11 Conference Proceedings Contact hole CD and profile metrology of binary and phase-shift masks: effect of modeling strategies in application of scafferometery [6349-22]

Lee, K., Yedur, S., Tavassoli, M., Baik, K., Tabet, M.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Analysis of Fluorocarbon Film Deposited by C4F8/CO Gas Plasma

Akimoto, T., Furuouya, S., Harashima, K., Ikawa, E.

Electrochemical Society
12 Conference Proceedings Improvement of relief algorithm to prevent inpatient’s down fall accident with night-vision CCd Camera [6051-48]

Matsuda N., Yamamoto T., Miwa M., Nukumi S., Mori K., Kuinose Y., Maeda E., Miura H., Taki K., Hori S., Abe N.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12