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Property of single-crystalline Si TFTs fabricated with μ-Czochralski (grain filter) process (Invited Paper)

Author(s):
Publication title:
Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5004
Pub. Year:
2003
Page(from):
10
Page(to):
19
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448040 [0819448044]
Language:
English
Call no.:
P63600/5004
Type:
Conference Proceedings

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