Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling

Investigation into the response of a micro-electro-mechanical compound pivot mirror using finite element modeling

Author(s):

Gass, F.R. ( Sandia National Labs. (USA) )
Dohner, J.L. ( Sandia National Labs. (USA) )
Spahn, O.B. ( Sandia National Labs. (USA) )
Garcia, E.J. ( Sandia National Labs. (USA) )
Grossetete, G.D. ( L&M Technologies, Inc. (USA) )

Publication title:

Physics and Simulation of Optoelectronic Devices XI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4986

Pub. Year:

2003

Page(from):

645

Page(to):

653

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447869 [0819447862]

Language:

English

Call no.:

P63600/4986

Type:

Conference Proceedings

Details

TDL ID:	ZA00012969
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Physics and Simulation of Optoelectronic Devices
Conf. info. (Number):	2003 : 11th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.31

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