Improved layout for a resonant 2D micro scanning mirror with low operation voltages

Improved layout for a resonant 2D micro scanning mirror with low operation voltages

Author(s):

Wolter, A. ( Fraunhofer-Institut fuer Microelektronische Schaltungen und Systeme (Germany) )
Schenk, H.
Gaumont, E.
Lakner, H.K.

Publication title:

MOEMS Display and Imaging Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4985

Pub. Year:

2003

Page(from):

72

Page(to):

82

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447852 [0819447854]

Language:

English

Call no.:

P63600/4985

Type:

Conference Proceedings

Details

TDL ID:	ZA00012968
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS display and imaging systems
Conf. info. (Number):	2003
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.29

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