Replication of micro-optical elements in hybrid organic-inorganic materials
- Author(s):
Topart, P.A. ( INO (Canada) ) Beaulieu, R.M. ( INO (Canada) ) Leclair, S. ( INO (Canada) ) Poirier, M. ( INO (Canada) ) Pelletier, J. ( INO (Canada) ) Bernier, M. ( INO (Canada) ) Jerominek, H. ( INO (Canada) ) - Publication title:
- Micromachining Technology for Micro-Optics and Nano-Optics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4984
- Pub. Year:
- 2003
- Page(from):
- 54
- Page(to):
- 62
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447845 [0819447846]
- Language:
- English
- Call no.:
- P63600/4984
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Continuous surface-relief micro-optical elements and their replication in polymer and other materials
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Design and fabrication of giant micromirrors using electroplating-based technology
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
On-chip replication of high-sag micro-optical components fabricated by direct laser writing
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices
Society of Photo-optical Instrumentation Engineers |
9
Conference Proceedings
Toughened, Inorganic-Organic Hybrid Materials for Microelectronic Application
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Micro-optical elements fabricated and replicated in semiconductor materials
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Development of dielectric and amorphous-silicon-based thin film coatings for room- and cryogenic temperature applications
SPIE - The International Society of Optical Engineering |
MRS-Materials Research Society |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Photopolymerization of hybrid organic/inorganic materials based on nanostructured units for photonic applications
SPIE - The International Society of Optical Engineering |