Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and SiO2 substrates (Invited Paper)

Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and SiO2 substrates (Invited Paper)

Author(s):

Neto, L.G. ( Univ. of Sao Paulo (Brazil) )
Cirino, G.A. ( EletroPPAr Industria Eletrynica Ltda (Brazil) )
Mansano, R.D. ( Univ. of Sao Paulo (Brazil) )
Cardona, P.S.P. ( Univ. of Sao Paulo (Brazil) )
Verdonck, P. ( Univ. of Sao Paulo (Brazil) )

Publication title:

Micromachining Technology for Micro-Optics and Nano-Optics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4984

Pub. Year:

2003

Page(from):

18

Page(to):

28

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447845 [0819447846]

Language:

English

Call no.:

P63600/4984

Type:

Conference Proceedings

Details

TDL ID:	ZA00012967
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining technology for micro-optics and nano-optics
Conf. info. (Number):	2003
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.29

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