Electrostatically actuated membrane mirrors for adaptive optics
- Author(s):
Kurczynski, P.A. ( Lucent Technologies/Bell Labs. (USA) ) Bogart, G.R. ( Agere Systems/Bell Labs. (USA) ) Lai, W.Y.-C. ( Lucent Technologies/Bell Labs. (USA) ) Lifton, V. ( Lucent Technologies/Bell Labs. (USA) ) Mansfield, W.M. ( Lucent Technologies/Bell Labs. (USA) ) Tyson, J.A. ( Lucent Technologies/Bell Labs. (USA) ) Sadoulet, B. ( Univ. of California/Berkeley (USA) ) Williams, D.R. ( Univ. of Rochester (USA) ) - Publication title:
- MOEMS and Miniaturized Systems III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4983
- Pub. Year:
- 2003
- Page(from):
- 305
- Page(to):
- 313
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447838 [0819447838]
- Language:
- English
- Call no.:
- P63600/4983
- Type:
- Conference Proceedings
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