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Out-of-plane rotary micromirrors for reconfigurable photonic applications

Author(s):
Dagel, D.J. ( Sandia National Labs. (USA) )
Blum Spahn, O.
Allen, J.J.
Kemme, S.A.
Grossetete, G.D.
Gass, F. R.
1 more
Publication title:
MOEMS and Miniaturized Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4983
Pub. Year:
2003
Page(from):
114
Page(to):
121
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447838 [0819447838]
Language:
English
Call no.:
P63600/4983
Type:
Conference Proceedings

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