MOEMS device design, development, and integration for interconnect applications
- Author(s):
- Castracane, J. ( Univ. at Albany (USA) )
- Xu, B.
- Madison, S.
- Verheggen, J.
- Yan, D.
- Publication title:
- MOEMS and Miniaturized Systems III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4983
- Pub. Year:
- 2003
- Page(from):
- 102
- Page(to):
- 108
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447838 [0819447838]
- Language:
- English
- Call no.:
- P63600/4983
- Type:
- Conference Proceedings
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