Stress and curvature in MEMS mirrors
- Author(s):
Gass, F. R. ( Sandia National Labs. (USA) ) Dagel, D. J. Adams, D.P. Grossetete, G.D. ( L&M Technologies, Inc. (USA) ) Blum Spahn, O. ( Sandia National Labs. (USA) ) Kemme, S.A. Mani, S.S. Malloy, K.J. ( CHTM/Univ. of New Mexico (USA) ) - Publication title:
- MOEMS and Miniaturized Systems III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4983
- Pub. Year:
- 2003
- Page(from):
- 87
- Page(to):
- 93
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447838 [0819447838]
- Language:
- English
- Call no.:
- P63600/4983
- Type:
- Conference Proceedings
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