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Stress and curvature in MEMS mirrors

Author(s):
Gass, F. R. ( Sandia National Labs. (USA) )
Dagel, D. J.
Adams, D.P.
Grossetete, G.D. ( L&M Technologies, Inc. (USA) )
Blum Spahn, O. ( Sandia National Labs. (USA) )
Kemme, S.A.
Mani, S.S.
Malloy, K.J. ( CHTM/Univ. of New Mexico (USA) )
3 more
Publication title:
MOEMS and Miniaturized Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4983
Pub. Year:
2003
Page(from):
87
Page(to):
93
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447838 [0819447838]
Language:
English
Call no.:
P63600/4983
Type:
Conference Proceedings

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