Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients

Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients

Author(s):

Gray, G.D. ( Georgia Institute of Technology (USA) )
Morgan, M.J. ( Georgia Institute of Technology (USA) )
Kohl, P.A. ( Georgia Institute of Technology (USA) )

Publication title:

MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4981

Pub. Year:

2003

Page(from):

202

Page(to):

213

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447814 [0819447811]

Language:

English

Call no.:

P63600/4981

Type:

Conference Proceedings

Details

TDL ID:	ZA00012964
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS components and applications for industry, automobiles, aerospace, and communication
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.29

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