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Microfabricated recurve bimetallic actuator

Author(s):
Datta, P. ( Louisiana State Univ. (USA) )
Sathe, M. ( Louisiana State Univ. (USA) )
Namburi, L. ( Louisiana State Univ. (USA) )
Podlaha, E.J. ( Louisiana State Univ. (USA) )
Acharya, S. ( Louisiana State Univ. (USA) )
Murphy, M.C. ( Louisiana State Univ. (USA) )
1 more
Publication title:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4981
Pub. Year:
2003
Page(from):
83
Page(to):
94
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447814 [0819447811]
Language:
English
Call no.:
P63600/4981
Type:
Conference Proceedings

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