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Monocrystalline Si membranes for pressure sensors fabricated by a novel surface micromachining process using porous silicon

Author(s):
Artmann, H. ( Robert Bosch GmbH (Germany) )
Schaefer, F. ( Robert Bosch GmbH (Germany) )
Lammel, G. ( Robert Bosch GmbH (Germany) )
Armbruster, S. ( Robert Bosch GmbH (Germany) )
Benzel, H. ( Robert Bosch GmbH (Germany) )
Schelling, C. ( Robert Bosch GmbH (Germany) )
Weber, H. ( Robert Bosch GmbH (Germany) )
Vossenberg, H.-G. ( Robert Bosch GmbH (Germany) )
Gampp, R. ( Robert Bosch GmbH (Germany) )
Muchow, J. ( Robert Bosch GmbH (Germany) )
Laermer, F. ( Robert Bosch GmbH (Germany) )
Finkbeiner, S. ( Robert Bosch GmbH (Germany) )
7 more
Publication title:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4981
Pub. Year:
2003
Page(from):
65
Page(to):
70
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447814 [0819447811]
Language:
English
Call no.:
P63600/4981
Type:
Conference Proceedings

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