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Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Author(s):
Hankins, M.G. ( Sandia National Labs. (USA) )
Resnick, P.J. ( Sandia National Labs. (USA) )
Clews, P.J. ( Sandia National Labs. (USA) )
Mayer, T.M. ( Sandia National Labs. (USA) )
Wheeler, D.R. ( Sandia National Labs. (USA) )
Tanner, D.M. ( Sandia National Labs. (USA) )
Plass, R.A. ( Sandia National Labs. (USA) )
2 more
Publication title:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4980
Pub. Year:
2003
Page(from):
238
Page(to):
247
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447807 [0819447803]
Language:
English
Call no.:
P63600/4980
Type:
Conference Proceedings

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