Resonant frequency method for monitoring MEMS fabrication
- Author(s):
- Tanner, D.M. ( Sandia National Labs. (USA) )
- Owen, A.C. ( Sandia National Labs. (USA) )
- Rodriguez, F. Jr., ( Sandia National Labs. (USA) )
- Publication title:
- Reliability, Testing, and Characterization of MEMS/MOEMS II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4980
- Pub. Year:
- 2003
- Page(from):
- 220
- Page(to):
- 228
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447807 [0819447803]
- Language:
- English
- Call no.:
- P63600/4980
- Type:
- Conference Proceedings
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