Mechanical reliabilty of MEMS fabricated by a special technology using standard silicon wafers

Mechanical reliabilty of MEMS fabricated by a special technology using standard silicon wafers

Author(s):

Lohmann, C. ( Technische Univ. Chemnitz (Germany) )
Bertz, A. ( Technische Univ. Chemnitz (Germany) )
Kuechler, M. ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
Reuter, D. ( Technische Univ. Chemnitz (Germany) )
Gessner, T. ( Technische Univ. Chemnitz (Germany) )

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4980

Pub. Year:

2003

Page(from):

200

Page(to):

207

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447807 [0819447803]

Language:

English

Call no.:

P63600/4980

Type:

Conference Proceedings

Details

TDL ID:	ZA00012963
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

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