Mechanical reliabilty of MEMS fabricated by a special technology using standard silicon wafers
- Author(s):
- Lohmann, C. ( Technische Univ. Chemnitz (Germany) )
- Bertz, A. ( Technische Univ. Chemnitz (Germany) )
- Kuechler, M. ( Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany) )
- Reuter, D. ( Technische Univ. Chemnitz (Germany) )
- Gessner, T. ( Technische Univ. Chemnitz (Germany) )
- Publication title:
- Reliability, Testing, and Characterization of MEMS/MOEMS II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4980
- Pub. Year:
- 2003
- Page(from):
- 200
- Page(to):
- 207
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447807 [0819447803]
- Language:
- English
- Call no.:
- P63600/4980
- Type:
- Conference Proceedings
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