Micro-/nanoscale tribology and mechanics of MEMS/NEMS materials, lubricants and devices (Invited Paper)

Micro-/nanoscale tribology and mechanics of MEMS/NEMS materials, lubricants and devices (Invited Paper)

Author(s):: Bhushan, B. ( The Ohio State Univ. (USA) )
Publication title:: Reliability, Testing, and Characterization of MEMS/MOEMS II
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4980
Pub. Year:: 2003
Page(from):: 114
Page(to):: 129
Pages:: 16
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819447807 [0819447803]
Language:: English
Call no.:: P63600/4980
Type:: Conference Proceedings

Details

TDL ID:	ZA00012963
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.29

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