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Processing of metals and semiconductors by a femtosecond laser-based microfabrication system

Author(s):
Meunier, M. ( Ecole Polytychnique de Montryal (Canada) )
Fisette, B. ( Ecole Polytychnique de Montryal (Canada) )
Houle, A. ( Ecole Polytychnique de Montryal (Canada) )
Kabashin, A.V. ( Ecole Polytychnique de Montryal (Canada) )
Broude, S.V. ( Resonetics Inc. (USA) )
Miller, P. ( Resonetics Inc. (USA) )
1 more
Publication title:
Commercial and biomedical applications of ultrafast lasers III : 28-30 January 2003, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4978
Pub. Year:
2003
Page(from):
169
Page(to):
179
Pages:
11
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447784 [0819447781]
Language:
English
Call no.:
P63600/4978
Type:
Conference Proceedings

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