Nanostructuring of semiconductor materials and metallic thin films using femtosecond laser and scanning probe microscope

Nanostructuring of semiconductor materials and metallic thin films using femtosecond laser and scanning probe microscope

Author(s):

Chimmalgi, A. ( Univ. of California/Berkeley (USA) )
Choi, T. ( Univ. of California/Berkeley (USA) )
Hwang, D. ( Univ. of California/Berkeley (USA) )
Grigoropoulos, C.P. ( Univ. of California/Berkeley (USA) )

Publication title:

Commercial and biomedical applications of ultrafast lasers III : 28-30 January 2003, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4978

Pub. Year:

2003

Page(from):

129

Page(to):

137

Pages:

9

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447784 [0819447781]

Language:

English

Call no.:

P63600/4978

Type:

Conference Proceedings

Details

TDL ID:	ZA00012962
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Commercial and Biomedical Applications of Ultrafast Lasers
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.28-2003.01.30

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