High-speed singulation of electronic packages using a frequency-doubled Nd:YAG laser in a water jet and realization of a 200-W green laser

High-speed singulation of electronic packages using a frequency-doubled Nd:YAG laser in a water jet and realization of a 200-W green laser

Author(s):

Wagner, F.R. ( Synova SA (Switzerland) )
Hu, W. ( Quantronix Corp. (USA) )
Spiegel, A. ( Budapest Univ. of Technology and Economics (Hungary) )
Vago, N. ( Budapest Univ. of Technology and Economics (Hungary) )
Richerzhagen, B. ( Synova SA (Switzerland) )

Publication title:

Photon Processing in Microelectronics and Photonics II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4977

Pub. Year:

2003

Page(from):

563

Page(to):

568

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447777 [0819447773]

Language:

English

Call no.:

P63600/4977

Type:

Conference Proceedings

Details

TDL ID:	ZA00012961
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Photon processing in microelectronics and photonics
Conf. info. (Number):	2003 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2003.01.27-2003.01.30

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