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Laser processing of ceramic and crystalline wafer substrates for microelectronic applications (Invited Paper)

Author(s):
Ashkenasi, D. ( Laser- und Medizin-Technologie GmbH (Germany) )
Binder, A. ( Laser- und Medizin-Technologie GmbH (Germany) )
Jaber, H. ( Laser- und Medizin-Technologie GmbH (Germany) )
Kern, H. ( Laser- und Medizin-Technologie GmbH (Germany) )
Mueller, N. ( Laser- und Medizin-Technologie GmbH (Germany) )
Ziegert, A. ( Laser- und Medizin-Technologie GmbH (Germany) )
1 more
Publication title:
Photon Processing in Microelectronics and Photonics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4977
Pub. Year:
2003
Page(from):
542
Page(to):
554
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
Language:
English
Call no.:
P63600/4977
Type:
Conference Proceedings

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