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Laser-based manufacturing of high-accuracy electrodes into brittle materials

Author(s):
  • Kulik, C. ( Laser Zentrum Hannover e.V. (Germany) )
  • Ostendorf, A. ( Laser Zentrum Hannover e.V. (Germany) )
  • Meyer, F. ( Laser Zentrum Hannover e.V. (Germany) )
Publication title:
Photon Processing in Microelectronics and Photonics II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4977
Pub. Year:
2003
Page(from):
306
Page(to):
313
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
Language:
English
Call no.:
P63600/4977
Type:
Conference Proceedings

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