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Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Author(s):
Publication title:
Coherence domain optical methods and optical coherence tomography in biomedicine VII : 27-29 January 2003, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4956
Pub. Year:
2003
Page(from):
139
Page(to):
146
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
16057422
ISBN:
9780819447562 [0819447560]
Language:
English
Call no.:
P63600/4956
Type:
Conference Proceedings

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