Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices

Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices

Author(s):

Tarraf, A. ( Univ. Kassel (Germany) )

Daleiden, J. ( Univ. Kassel (Germany) )

Irmer, S. ( Univ. Kassel (Germany) )

Rangelov, V. ( Univ. Kassel (Germany) )

Roemer, F. ( Univ. Kassel (Germany) )

Prott, C. ( Univ. Kassel (Germany) )

Ataro, E. ( Univ. Kassel (Germany) )

Hillmer, H. ( Univ. Kassel (Germany) )

Fuhrmann, T. ( Univ. Kassel (Germany) )

Spehr, T. ( Univ. Kassel (Germany) )

Salbeck, J. ( Univ. Kassel (Germany) )

6 more

Publication title:

MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4945

Pub. Year:

2003

Page(from):

9

Page(to):

20

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447401 [0819447404]

Language:

English

Call no.:

P63600/4945

Type:

Conference Proceedings

Details

TDL ID:	ZA00012929
Series ID:	PA00000029
Conf. info. (Name):	Photonics Fabrication Europe : MEMS/MOEMS
Conf. info. (Number):	2002
Conf. info. (Venue):	Brugge, Belgium
Conf. info. (Date):	2002.10.28-2002.10.29

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