Fabrication technology for micromachined spatial light modulators
- Author(s):
- Sakarya, S. ( Technische Univ. Delft (Netherlands) )
- Vdovin, G.V. ( Technische Univ. Delft (Netherlands) )
- Sarro, P.M. ( Technische Univ. Delft (Netherlands) )
- Publication title:
- Integrated Optical Devices: Fabrication and Testing
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4944
- Pub. Year:
- 2003
- Page(from):
- 219
- Page(to):
- 226
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447395 [0819447390]
- Language:
- English
- Call no.:
- P63600/4944
- Type:
- Conference Proceedings
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