Fabrication and characterization of waveguide structures on SOI (Invited Paper)

Fabrication and characterization of waveguide structures on SOI (Invited Paper)

Author(s):

Aalto, T.T. ( VTT Ctr. for Microelectronics (Finland) )
Heimala, P. ( VTT Ctr. for Microelectronics (Finland) )
Yliniemi, S. ( VTT Ctr. for Microelectronics (Finland) )
Kapulainen, M. ( VTT Ctr. for Microelectronics (Finland) )
Leppihalme, M.J. ( VTT Ctr. for Microelectronics (Finland) )

Publication title:

Integrated Optical Devices: Fabrication and Testing

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4944

Pub. Year:

2003

Page(from):

183

Page(to):

194

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447395 [0819447390]

Language:

English

Call no.:

P63600/4944

Type:

Conference Proceedings

Details

TDL ID:	ZA00012928
Series ID:	PA00000029
Conf. info. (Name):	Photonics Fabrication Europe : Integrated optical devices
Conf. info. (Number):	2002
Conf. info. (Venue):	Brugge, Belgium
Conf. info. (Date):	2002.10.30-2002.11.01

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