Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics

Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics

Author(s):

Girard, G. ( Ecole Polytechnique (France) )
Danieka, D. ( Ecole Polytechnique (France) )
Bulkin, P. ( Ecole Polytechnique (France) )
Bouree, J.-E. ( Ecole Polytechnique (France) )

Publication title:

Integrated Optical Devices: Fabrication and Testing

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4944

Pub. Year:

2003

Page(from):

62

Page(to):

71

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447395 [0819447390]

Language:

English

Call no.:

P63600/4944

Type:

Conference Proceedings

Details

TDL ID:	ZA00012928
Series ID:	PA00000029
Conf. info. (Name):	Photonics Fabrication Europe : Integrated optical devices
Conf. info. (Number):	2002
Conf. info. (Venue):	Brugge, Belgium
Conf. info. (Date):	2002.10.30-2002.11.01

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