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Direct laser writing on porous silicon

Author(s):
  • Rossi, A.M. ( Istituto Elettrotecnico Nazionale Galileo Ferraris (Italy) )
  • Borini, S. ( Istituto Elettrotecnico Nazionale Galileo Ferraris (Italy) )
  • Boarino, L. ( Istituto Elettrotecnico Nazionale Galileo Ferraris (Italy) )
  • Amato, G. ( Istituto Elettrotecnico Nazionale Galileo Ferraris (Italy) )
Publication title:
Laser Micromachining for Optoelectronic Device Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4941
Pub. Year:
2003
Page(from):
99
Page(to):
106
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447364 [0819447366]
Language:
English
Call no.:
P63600/4941
Type:
Conference Proceedings

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