F2-laser microfabrication of sub-μm gratings in fused silica
- Author(s):
Ihlemann, J. ( Laser-Lab. Goettingen e.V. (Germany) ) Mueller, S. ( Laser-Lab. Goettingen e.V. (Germany) ) Puschmann, S. ( Laser-Lab. Goettingen e.V. (Germany) ) Schaefer, D. ( Laser-Lab. Goettingen e.V. (Germany) ) Herman, P.R. ( Univ. of Toronto (Canada) ) Li, J. ( Univ. of Toronto (Canada) ) Wei, M. ( Univ. of Toronto (Canada) ) - Publication title:
- Laser Micromachining for Optoelectronic Device Fabrication
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4941
- Pub. Year:
- 2003
- Page(from):
- 94
- Page(to):
- 98
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447364 [0819447366]
- Language:
- English
- Call no.:
- P63600/4941
- Type:
- Conference Proceedings
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