Three-dimensional microfabrication with femtosecond laser pulses

Three-dimensional microfabrication with femtosecond laser pulses

Author(s):

Serbin, J. ( Laser Zentrum Hannover e.V. (Germany) )
Houbertz, R. ( Fraunhofer-Institut fuer Silicatforschung (Germany) )
Fallnich, C. ( Laser Zentrum Hannover e.V. (Germany) )
Chichkov, B.N. ( Laser Zentrum Hannover e.V. (Germany) )

Publication title:

Laser Micromachining for Optoelectronic Device Fabrication

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4941

Pub. Year:

2003

Page(from):

73

Page(to):

76

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447364 [0819447366]

Language:

English

Call no.:

P63600/4941

Type:

Conference Proceedings

Details

TDL ID:	ZA00012925
Series ID:	PA00000029
Conf. info. (Name):	Photonics Fabrication Europe : Laser micromachining for optoelectronic device fabrication
Conf. info. (Number):	2002
Conf. info. (Venue):	Brugge, Belgium
Conf. info. (Date):	2002.10.30

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