Nano-film assisted anodic bonding
- Author(s):
- Wei, J. ( Singapore Institute of Manufacturing Technology (Singapore) )
- Xie, H. ( Singapore Institute of Manufacturing Technology (Singapore) )
- Wong, C.K. ( Singapore Institute of Manufacturing Technology (Singapore) )
- Lee, L.C. ( Singapore Institute for Manufacturing Technology (Singapore) )
- Publication title:
- Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4936
- Pub. Year:
- 2002
- Page(from):
- 455
- Page(to):
- 463
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447319 [0819447315]
- Language:
- English
- Call no.:
- P63600/4936
- Type:
- Conference Proceedings
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