Optimization of Au mask fabrication processes for LIGA applications
- Author(s):
- Shan, X.C. ( National Institute of Advanced Industrial Science )
- Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
- Ikehara, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
- Mekaru, H. ( Himeji Institute of Technology (Japan) )
- Hattori, T. ( Himeji Institute of Technology (Japan) )
- Publication title:
- Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4936
- Pub. Year:
- 2002
- Page(from):
- 356
- Page(to):
- 364
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447319 [0819447315]
- Language:
- English
- Call no.:
- P63600/4936
- Type:
- Conference Proceedings
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