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Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property

Author(s):
  • Lebedev, M. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Akedo, J. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
345
Page(to):
348
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

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