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Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission

Author(s):
Liu, G. ( Swinburne Univ. of Technology (Australia) )
Harvey, E.C. ( Swinburne Univ. of Technology (Australia) )
Toncich, D.J. ( Swinburne Univ. of Technology (Australia) )
Hayes, J.P. ( Swinburne Univ. of Technology (Australia) )
Ng, C.K. ( Swinburne Univ. of Technology (Australia) )
Jin, H. ( Swinburne Univ. of Technology (Australia) )
Solomon, M. ( Swinburne Univ. of Technology (Australia) )
2 more
Publication title:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4936
Pub. Year:
2002
Page(from):
146
Page(to):
153
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
Language:
English
Call no.:
P63600/4936
Type:
Conference Proceedings

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