Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)

Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)

Author(s):

Woollam, J.A. ( J.A. Woollam Co., Inc. (USA) )
Bungay, C.L. ( J.A. Woollam Co., Inc. (USA) )
Yan, L. ( Univ. of Nebraska, Lincoln (USA) )
Thompson, D.W.
Hilfiker, J.N. ( J.A. Woollam Co., Inc. (USA) )

Publication title:

Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4932

Pub. Year:

2003

Page(from):

393

Page(to):

404

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447272 [0819447277]

Language:

English

Call no.:

P63600/4932

Type:

Conference Proceedings

Details

TDL ID:	ZA00012919
Series ID:	PA00000029
Conf. info. (Name):	Laser Damege : International Workshop on Laser Beam and Optics Characterization ; Annual Boulder Damage Symposium
Conf. info. (Number):	2002 : 7th ; 34th
Conf. info. (Venue):	Boulder, CO, USA
Conf. info. (Date):	2002.09.18-2002.09.19 ; 2002.09.16-2002.09.18

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