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THIN FILM DEPOSITION BY SOL-GEL AND CVD PROCESSING OF METAL-ORGANIC PRECURSORS

Author(s):
Mathur, S.  
Publication title:
Chemical physics of thin film deposition processes for micro- and nano-technologies
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
55
Pub. Year:
2002
Page(from):
91
Page(to):
118
Pages:
28
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402005244 [1402005245]
Language:
English
Call no.:
N17050/55
Type:
Conference Proceedings

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