Fabrication and Characterization of 200μm Deep, Dry Etched Via Holes for GaAs MMICs
- Author(s):
Rawal, D.S. Agarwal, Vanita R. Sharma, H.S. Sai Saravanan, G. Pandey, A.K. Shukla, S.R. Sharma, Renu Kumar, Ashok Aggarwal, Anil Ray, U.C. Kumar, Rajesh Prasad, S.D. Suryanarayana, P. Rao, A.V.S.K. - Publication title:
- Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001)
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4746
- Pub. Year:
- 2002
- Vol.:
- VOL-2
- Page(from):
- 1034
- Page(to):
- 1037
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445001 [0819445002]
- Language:
- English
- Call no.:
- P63600/4746
- Type:
- Conference Proceedings
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