Simulation of excimer laser micromachined 3D surface using a CAD solid modeling package

Simulation of excimer laser micromachined 3D surface using a CAD solid modeling package

Author(s):

Hume, R.G. ( Swinburne Univ. of Technology (Australia) )
Lovenitti, P.G. ( Industrial Research Institute Swinburne (Australia) )
Hayes, J.P. ( Swinburne Univ. of Technology (Australia) )
Harvey, E.C.

Publication title:

Smart structures, devices, and systems : 16-18 December 2002 Melbourne, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4935

Pub. Year:

2002

Page(from):

436

Page(to):

444

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447302 [0819447307]

Language:

English

Call no.:

P63600/4935

Type:

Conference Proceedings

Details

TDL ID:	ZA00012783
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart Structures, Devices, and Systems
Conf. info. (Number):	2002
Conf. info. (Venue):	Melbourne, Australia
Conf. info. (Date):	2002.12.16-2002.12.18

Similar Items:

1 Conference Proceedings Automated generation of NC part programs for excimer laser ablation micromachining from known 3D surfaces Mutapcic, E., Lovenitti, P.G., Hayes, J.P. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Spatially controlled surface chemistry by excimer laser ablation of thin films Thissen, H., Hayes, J.P., Muir, B.W., Atkin, M., Harvey, E.C. SPIE-The International Society for Optical Engineering
2 Conference Proceedings 3D visualization tool for excimer laser micromachining Mutapcic,E., lovenitti,P., Harvey,E.C. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Excimer laser patterning of TiN film from metal sacrificial layers Dowling, A., Ghantasala, M.K., Hayes, J.P., Harvey, E.C., Doyle, D. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication Harvey, E.C., Hayes, J.P. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Excimer laser ablation for spatially controlled protein patterns Thissen, H., Hayes, J.P., Kingshott, P., Johnson, G., Harvey, E.C., Griesser, H.J. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Excimer laser ablation of plasma polymers for cell and tissue culture applications Thissen,H., Hayes,J.P., Hartley,P.G., Johnson,G., Harvey,E.C., Griesser,H.J. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Laser micromachining and nickel plating of high-aspect-ratio structures in polymer molds Jin,H., Ghantasala,M.K., Hayes,J.P., Jolic,K., Harvey,E.C. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Micromachining of TiNi shape memory alloy by excimer laser ablation Davies, S.T., Harvey, E.C., Jin, H., Hayes, J.P., Ghantasala, M.K. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Semi-automatic calibration technique using six inertial frames of reference Lai, A., James, D.A., Hayes, J.P., Harvey, E.C. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Excimer laser ablation used for the fabrication of micro-optic phase and diffraction elements Harvey,E.C., Hayes,J.P., Dempster,B.C., Mackin,T.R., Scholten,R.E. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission Liu, G., Harvey, E.C., Toncich, D.J., Hayes, J.P., Ng, C.K., Jin, H., Solomon, M. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12