Toward MEMS-based infrared tunable microspectrometers
- Author(s):
Antoszewski, J. ( Univ. of Western Australia (Australia) ) Dell, J.M. Shivalimar, T. Martyniuk, M. Winchester, K. Wehner, J. Musca, C.A. Faraone, L. - Publication title:
- Smart structures, devices, and systems : 16-18 December 2002 Melbourne, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4935
- Pub. Year:
- 2002
- Page(from):
- 148
- Page(to):
- 155
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447302 [0819447307]
- Language:
- English
- Call no.:
- P63600/4935
- Type:
- Conference Proceedings
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